대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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- Pages.761-763
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- 1998
스퍼터링법으로 제작된 Co-Cr 박막에서 가스 압력이 c-축 배향성에 미치는 영향
The Effect of Gas Pressure on the c-axis Orientation Properties of Co-Cr Thin Film prepared by Sputtering Method
- Choi, Sung-Min (KwangWoon Univ. Electrical Eng) ;
- Son, In-Hwan (KwangWoon Univ. Electrical Eng) ;
- Kim, Jae-Hwan (KwangWoon Univ. Electrical Eng) ;
- Kim, Kyung-Hwan (KyungWon Univ. School of Electrical & Electronics Eng)
- 발행 : 1998.11.28
초록
In this paper, Co-Cr thin films which are known for a excellent perpendicular magnetic recording media were prepared. Changing target- substrate distance, Ar gas pressure and arriving atoms, the incident angle and c-axis orientation properties by using the facing targets sputtering system. We evaluated the c-axis dispersion angle by measu ring half-height width with Micro area X-Ray Diffractometer, measured the thickness of thin film with Ellipsometer. The magnetic properties were compared measuring in-plane squareness and perpendicular coercivity with vibrating sample Magnetometer.
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