Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on Structural and Dielectric Properties of the (Ba, Sr)$TiO_3$ Targets for Laser Ablation

Laser Ablation용 (Ba,Sr)$TiO_3$ 타겟의 구조 및 유전특성에 관한 연구

  • 홍상기 (연세대학교 전기공학과) ;
  • 김성구 (연세대학교 전기공학과) ;
  • 마석범 (연세대학교 전기공학과) ;
  • 장낙원 (연세대학교 전기공학과) ;
  • 최형욱 (경원대학교 전기전자공학부) ;
  • 박창엽 (연세대학교 전기공학과)
  • Published : 1998.11.01
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Abstract

(Ba.Sr)TiO$_3$(BST) ceramics were fabricated with different Ba/Sr ratios and the str dielectric properties of the BST bulk ceramics were investigated. As the Ba/sr ratios dielectric constant decreased. (Ba$_{0.7}$Sr$_{0.3}$)TiO$_3$ (BST(70/30)) showed a maximum dielec value of $\varepsilon$$_{r}$=8.856, this showed that the decrease of Ba/Sr ratios had made BST thin dielectrics. Targets were fabricated and made into film by PLD process and the thin film by PLD process have good stoichiometry with the targets.rgets.

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