Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1998.11a
- /
- Pages.88-89
- /
- 1998
Modification and Adhesion Improvement of Non-cubic BN Interfacial Layers by $Post-N^+$ Implantation.
이온주입법에 의한 BN박막의 계면구조 개선 및 밀착력 향상
Abstract
Keywords