NANOCRYSTAL VS. DEFECT-RELATED PHOTO-LUMINESCENCE IN $SiO_2$ LAYERS IMPLANTED BY Ge AND Si IONS

  • Jeong, J.Y. (Dept. of Met. Eng., Yonsei Univ.) ;
  • Oh, M.S. (Dept. of Met. Eng., Yonsei Univ.) ;
  • Im, S. (Dept. of Met. Eng., Yonsei Univ.) ;
  • Kim, H.B. (Dept. of Physics & Atomic-scale Surface Science Research Center, Yonsei Univ.) ;
  • Chae, K.H. (Dept. of Physics & Atomic-scale Surface Science Research Center, Yonsei Univ.) ;
  • Whang, C.N. (Dept. of Physics & Atomic-scale Surface Science Research Center, Yonsei Univ.) ;
  • Song, J.H. (KIST)
  • Published : 1998.08.01