Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.96.1-96
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- 1998
ATOMIC LAYER DEPOSITION OF CALCIUM SULFIDE THIN FILMS IN TRAVELING WAVE REACTOR
- Yun, Sun-Jin (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Kim, Y.S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Nam, K.S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute)
- Published : 1998.08.01
Abstract
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