Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.86.2-86
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- 1998
INITIAL GROWTH MODE OF AlN(002)/SAPPHIRE(001) THIN FILMS GROWN BY RF MAGNETRON SPUTTERING
- Kang, H.C. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
- Seo, S.H. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
- Yi, M.S. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
- Lee, H.H. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology) ;
- Noh, D.Y. (Department of Materials Science and Engineering, and Center for Electronic Materials Research, Kwangju Institute of Science and Technology)
- Published : 1998.08.01
Abstract
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