Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
- /
- Pages.85.2-85
- /
- 1998
Structural Analysis of porous Si with Medium Energy Ion Scattering Spectroscopy
- D.W. Moon (Surface Analysis Group, Korea Research Institute of Standards and Science) ;
- Kim, H.K. (Surface Analysis Group, Korea Research Institute of Standards and Science) ;
- G.Kuri (Surface Analysis Group, Korea Research Institute of Standards and Science) ;
- Y.H. Ha (Department of Chemistry, KAIST) ;
- Kim, S.H. (Department of Chemistry, KAIST) ;
- J.H. Shim (Department of Electronic Engineering, Kyungpook National University) ;
- Lee, J.H. (Department of Electronic Engineering, Kyungpook National University)
- Published : 1998.08.01
Abstract
Keywords