Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.82.1-82
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- 1998
SILICON NANO-STRUCTURES VIA SELECTIVE SURFACE CHEMICAL REACTIONS UNDER ULTRAHIGH VACUUM
- Yun, Wan-Soo (Basic Research Laboratories, ETRI) ;
- Ha, Jeong-Sook (Basic Research Laboratories, ETRI) ;
- Park, Kang-Ho (Basic Research Laboratories, ETRI) ;
- Lee, El-Hang (Basic Research Laboratories, ETRI)
- Published : 1998.08.01
Abstract
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