DIRECT INTEGRATION OF PLATINUM ON POLY-SI SUBSTRATES BY METALOGANIC CHEMICAL SUBSTRATES BY METALOGRANIC CHEMICAL VAPOR DEPOSITION

  • Choi, Eun-Suck (Dept. of Materials Engineering, Chungnam National University) ;
  • Yoon, Soon-Gil (Dept. of Materials Engineering, Chungnam National University)
  • Published : 1998.08.01