Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.08a
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Pages.111.4-111
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1998

Materials Research Society of Korea (한국재료학회)

권호 표지

HOMOEPITAXIAL GROWTH OF HIGH QUALITY 6H-SiC THIN FILMS USING BIS-TRIMETHYLSILYLMETHANE BY CHEMICAL VAPOR DEPOSITION

Jeong, Jae-Kyeong (School of Materials Science and Engineering, Seoul National University) ;
Nah, Hoon-Joo (School of Materials Science and Engineering, Seoul National University) ;
Kim, Hyeong-Joon (School of Materials Science and Engineering, Seoul National University)

Published : 1998.08.01

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