Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.76.1-76
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- 1998
EFFECTS OF $N_2O$ PRESSURE ON THE CHARACTERISTICS OF ULTRA-THIN GATE OXYNITRIDE
- Joo, Moon-Sig (Hyundai Electronics Industries Co., Ltd.) ;
- Lee, Chan-Ho (Hyundai Electronics Industries Co., Ltd.) ;
- Yeo, In-Seok (Hyundai Electronics Industries Co., Ltd.)
- Published : 1998.08.01
Abstract
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