Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.136.4-136
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- 1998
BUFFER LAYER FOR PZT THIN FILMS ON Si(100) BY MOCVD USING ULTRASONIC SPRAYING
- Lee, Choon-Ho (School of Chemical and Materials Eng., Keimyung Univ.) ;
- Park, Soon-Ja (School of Materials Eng., Seoul National Univ.)
- Published : 1998.08.01
Abstract
Keywords