DEFECT STRICTURES IN SiGe LAYERS GROWN ON (001) Si BY RPCVD

  • Spirydon, R. (Dept. of Materials Science and Engineering, K-JIST) ;
  • Cho, J.H. (Dept. of Materials Science and Engineering, K-JIST) ;
  • Seong, T.Y. (Dept. of Materials Science and Engineering, K-JIST) ;
  • Lee, H.S. (Dept. of Physics antral Institute of Natural Sciences, Kyung Hee University)
  • Published : 1998.08.01