Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.103.1-103
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- 1998
SHALLOW JUNCTION DIODE FORMATION USING EPITAXIAL $CoSi_2$ AS A DIFFUSION SOURCE
- Bae, K. S. (Dep't. of Electronic Materiasls Eng., The Univ. of Suwon) ;
- Koo, B. C. (Dep't. of Electronic Materiasls Eng., The Univ. of Suwon) ;
- Jung, Y. S. (Dep't. of Electronic Materiasls Eng., The Univ. of Suwon)
- Published : 1998.08.01
Abstract
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