SHALLOW JUNCTION DIODE FORMATION USING EPITAXIAL $CoSi_2$ AS A DIFFUSION SOURCE

  • Bae, K. S. (Dep't. of Electronic Materiasls Eng., The Univ. of Suwon) ;
  • Koo, B. C. (Dep't. of Electronic Materiasls Eng., The Univ. of Suwon) ;
  • Jung, Y. S. (Dep't. of Electronic Materiasls Eng., The Univ. of Suwon)
  • Published : 1998.08.01