CHARACTERISTICS OF ZnO/DIAMOND THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING

  • Park, Y. W. (Thin Film Technology Center, Korea Institute of Science and Technology) ;
  • S. J. Yoon (Thin Film Technology Center, Korea Institute of Science and Technology) ;
  • Lee, J.K. (Thin Film Technology Center, Korea Institute of Science and Technology) ;
  • Y.J. Baik (Thin Film Technology Center, Korea Institute of Science and Technology) ;
  • S. K. Koh (Thin Film Technology Center, Korea Institute of Science and Technology)
  • Published : 1998.08.01