Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.42.2-42
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- 1998
CHARACTERIZATION OF RuO$_2$ ELECTRODES FOR FERROELECTRIC FILMS PREPARED BY MOCVD USING Ru(C$_{11}$ H$_{19}$ O$_2)_3$
- Lee, J.M. (School of Mat. Sci. Eng, Seul Nat'l Univ) ;
- Kang, S.Y. (School of Mat. Sci. Eng, Seul Nat'l Univ) ;
- Shin, J.C. (School of Mat. Sci. Eng, Seul Nat'l Univ) ;
- Hwang, C.S. (School of Mat. Sci. Eng, Seul Nat'l Univ) ;
- Kim, H.J. (School of Mat. Sci. Eng, Seul Nat'l Univ) ;
- Suk, C.G. (R &D Cneter, APEX Co. Ltd)
- Published : 1998.08.01
Abstract
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