THE STRESS EFFECT OF AN Ir TOP ELECTRODE ON HIGH DIELECTRIC (Ba, Sr)$TiO_3$CAPACITORS

  • Cha, Seon Y. (Dept. of Electrical Engineering, KAIST) ;
  • Jang, B.T. (Dept. of Electrical Engineering, KAIST) ;
  • Lee, H.C. (Dept. of Electrical Engineering, KAIST)
  • 발행 : 1998.08.01