Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.08a
/
Pages.39.2-39
/
1998

Materials Research Society of Korea (한국재료학회)

권호 표지

LOW TEMPERATURE PREPARATION OF FERROELECTRIC $SrBi_{2}Ta_{2}O_{9}$ THIN FILEMS BY A MODIFIED RF MAGNETRON SPUTTERING TECHNIQUE

Yang, Cheol-Hoon (Department of Materials Engineering, Chungnam National University, Daeduk Science Town) ;
Kim, Jae-Sun (Department of Materials Engineering, Chungnam National University, Daeduk Science Town) ;
Yoon, Soon-Gil (Department of Materials Engineering, Chungnam National University, Daeduk Science Town)

Published : 1998.08.01

PDF

⟨ Previous Next ⟩

Abstract

Keywords