Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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High dielectric ($Ba_{1-x}Sr_x$)($Ti_{1-x}Zr_x)O_3$thin film capacitors for semiconductor memory device applications

반도체 메모리 소자 응용을 위한 고유전 ($Ba_{1-x}Sr_x$)($Ti_{1-x}Zr_x)O_3$ 박막 캐패시터의 연구

  • Kim, Jae-Sun (Department of Materials Engineering, Chungnam National University, Daeduk Science Twon) ;
  • Yoon, Soon-Gil (Department of Materials Engineering, Chungnam National University, Daeduk Science Twon)
  • Published : 1998.11.01
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