Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.05a
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- Pages.114-114
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- 1998
Solid Phase Crystallization of Amorphous Silicon Thin Film(a-Si) by Surface Activation Treatment
표면 활성화 처리에 따른 비정질 실리콘 박막의 고상 결정화
Abstract
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