Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.05a
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- Pages.113-113
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- 1998
Variation of the Crystallinity and Orientation of PZT thin films with Deposition Temperature and RTA
증착온도와 금속열처리에 의한 PZT박막의 결정성 및 배향성 변화
Abstract
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