Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.05a
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Pages.85-85
/
1998

Materials Research Society of Korea (한국재료학회)

권호 표지

Characterization of platinum bottom electrode by MOCVD for the application of semiconducting memory capacitors

반도체 기억소자 케페시터를 위한 하부전극 Platinum 박막의 특성

Park, Eun-Suck (Chungnam National University Department of Materials Engineering Daeduk Science Town) ;
Yoon, Soon-Gil (Chungnam National University Department of Materials Engineering Daeduk Science Town)

Published : 1998.05.01

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