Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.05a
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- Pages.10-10
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- 1998
Inductively Coupled Plasma (ICP) Oxidation for Low-Temperature Poly-Si Thin Film Transistors
저온 다결정 실리콘 박막트랜지스터용 유도결합플라즈마 산화
Abstract
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