Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Kinetic Simulation of Magnetron Sputter

  • Shon, C.H. (Deparment of Physics Pohang University of Science) ;
  • Lee, J.K. (Deparment of Physics Pohang University of Science) ;
  • Lee, H.J. (Deparment of Physics Pohang University of Science)
  • Published : 1998.02.01
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