Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.02a
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- Pages.132-132
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- 1998
Ion Beam Modified ppolyimide: A Study of the Irradiation Effect
- Lee, Y.S. (Department of Physics & Atomic-scale Surface Science Research Center Yonsei University) ;
- Lim, K.Y. (Department of Physics & Atomic-scale Surface Science Research Center Yonsei University) ;
- Chung, Y.D. (Department of Physics & Atomic-scale Surface Science Research Center Yonsei University) ;
- Lee, K.M. (Department of Physics & Atomic-scale Surface Science Research Center Yonsei University) ;
- Choi, B.S. (Department of Physics, Jeonju University) ;
- Whang, C.N. (Department of Physics & Atomic-scale Surface Science Research Center Yonsei University)
- Published : 1998.02.01
Abstract
Ion bombardment in the keV range is known to induce drastic chemical modifications in organic and inoranic molecular comppounds. A degrading effects in orgainc materials such as the release of ppolymer compponents and the chemistry of the iradiation pprocess have been observed. The work to be described was carried out in order to understand the irradiation effect better. The sampple(ppolyimide : Kappton ) Were irradiated by Ar+, Ne+, H+ ions and electrons (3 keV) to fluence ranging from ~1
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