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The Korean Vacuum Society
http://www.kvs.or.kr
Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
1998.02a
/
Pages.66-67
/
1998
The Korean Vacuum Society (한국진공학회)
TMAH를 이용한단결정 실리콘의 식각특성
김환영
(선문대학교 첨단과학기술연구소) ;
조남인
(선문대학교 첨단과학기술연구소)
Published : 1998.02.01
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