Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.02a
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- Pages.44-44
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- 1998
Tribology of Si incorporated Diamond-like Carbon Films
- Kim, Myoung-Geun (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Lee, Kwang-Rveol (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Eun, Kwang-Yong (Thin Film Technology Research Center, Korea Institute of Science and Technology)
- Published : 1998.02.01
Abstract
It was observed that the friction coefficient decreased with increasing Si concentration in the l ilms. Furthermore, the friction behavior became more s때ble even when very small amount of S Si of less than 0.5 at. % was incorporatA:회 By analyzing the composition of the debris f formed, we could show that the low and stabilized friction coefficient is in마nately relatA:었 w with the formation of the Si rich oxide debris. These result supports the mechanism that the h hydrated silica debris is the reason for low friction coefficient in humid environment. Second e evidence of the role of Si rich oxide debris could be found in the triOO-chemical reactions d during initial stage of triho-test. When the Si concen
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