Growth and defect behaviour of diamond films grown on BEN-ppretreated Si substrates

  • Kim, D. G. (Deppartment of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
  • T-Y. SEONG (Deppartment of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
  • Y. J. BAIK (KIST, Centre for Thin Films Technol)
  • 발행 : 1998.06.01