Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.162-162
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- 1998
Stabilization of Direct Current pplasma and Large area diamond depposition
- Lee, Jae-Kapp (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Lee, Wook-Seong (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Baik, Young-Joon (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Jong-Wan ppark (Deppartment of metallurgical Engineering, Hanyang University) ;
- Eun, Kwang-Yong (Deppartment of metallurgical Engineering, Hanyang University)
- Published : 1998.06.01
Abstract
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