한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1998년도 제16회 학술발표회 논문개요집
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- Pages.159-159
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- 1998
Application of Charged Cluster Model to pparadoxical pphenomenon of Diamond Depposition and Simultaneous Grapphite Etching in the Diamond CVD pprocess
- I. D. Jeon (Center for Microstructure Science of Materials, Seoul National University) ;
- C. E. Seo (Deppt. Mater. Sci. & Eng., Korea Advanced Institute Science and Technology) ;
- S. J. L. Kang (Deppt. Mater. Sci. & Eng., Korea Advanced Institute Science and Technology) ;
- J. H. Han (Microstructure Science Groupp, Korea Research Institute of standards and Science) ;
- N. M. Hwang (Center for Microstructure Science of Materials, Seoul National University, Microstructure Science Groupp, Korea Research Institute of standards and Science)
- 발행 : 1998.06.01