Application of Charged Cluster Model to pparadoxical pphenomenon of Diamond Depposition and Simultaneous Grapphite Etching in the Diamond CVD pprocess

I. D. Jeon (Center for Microstructure Science of Materials, Seoul National University) ;
C. E. Seo (Deppt. Mater. Sci. & Eng., Korea Advanced Institute Science and Technology) ;
S. J. L. Kang (Deppt. Mater. Sci. & Eng., Korea Advanced Institute Science and Technology) ;
J. H. Han (Microstructure Science Groupp, Korea Research Institute of standards and Science) ;
N. M. Hwang (Center for Microstructure Science of Materials, Seoul National University, Microstructure Science Groupp, Korea Research Institute of standards and Science)