Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.154-154
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- 1998
Characteristics of pprolonged Anode-typpe Metal Ion Source
- Sung Han (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Park, Sung-Chang (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Kim, Ki-Hwan (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Yoon, Ki-Hyun (Deppartment of ceramic Engineering, Yonsei university) ;
- Park, Won-Kook (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Jung, Hyung-Jin (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
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Koh, Seok-Keun
(Thin Film Technology Research Center, Korea Institute of Science and Technology)
- Published : 1998.06.01
Abstract
Keywords