Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
권호 표지

DEVELOPMENT AND TESTS of HF RECTANGULAR ION SOURCE FOR TECHNOLOGICAL APPLICATIONS

  • Bougrov, G.E. (R&D Deppt., pplasma Tech Co., Ltd.) ;
  • Kondranin, S.G. (R&D Deppt., pplasma Tech Co., Ltd.) ;
  • Kralkina, E.A. (R&D Deppt., pplasma Tech Co., Ltd.) ;
  • avlov, V.B.
  • Published : 1998.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords