Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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A study on the interface of AIN/Si

  • Roh, Yong-Suk (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
  • Kim, Shin-Cheul (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
  • Kim, Ui-Sik (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University) ;
  • Jeong, Kwang-Ho (Department of Physics and Atomic Scale Surface Science Research Center, Yonsei University)
  • Published : 1998.06.01
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