Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.75-75
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- 1998
The variation of lattice constants of AlN on Si(111) during the growth
- Yi, M.-S. (Deppartment of Materials Science and Engineering, and Center for Electronic Materials Ressearch, Kwangju Institute of Science and Technology) ;
- Seo, S.-H. (Deppartment of Materials Science and Engineering, and Center for Electronic Materials Ressearch, Kwangju Institute of Science and Technology) ;
- Noh, D.Y. (Deppartment of Materials Science and Engineering, and Center for Electronic Materials Ressearch, Kwangju Institute of Science and Technology)
- Published : 1998.06.01
Abstract
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