Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.67-67
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- 1998
Precursor-Chemistry for III-V-Semiconductor-Compounds
- Susek, Harald (ACI Universitat Heidelberg, Im Neuenheimer Feld) ;
- Schafer, Jorg (ACI Universitat Heidelberg, Im Neuenheimer Feld) ;
- Fischer, Roland A. (Lehrstuhi fur Anorganishche Chemie II. Ruhr-Universitat)
- Published : 1998.06.01
Abstract
Keywords