Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Measurements of Bias-Potential on the Substrate in the Various Plasma Gas for Wide Bandgapp Thin Film

  • Lee, H.C. (Deppt. of Physics, Sun Moon Univ) ;
  • Park, J.H. (Deppt. of Physics, Sun Moon Univ) ;
  • Kim, D.W. (Deppt. of Physics, Sun Moon Univ) ;
  • Choi, S.S. (Deppt. of Physics, Sun Moon Univ)
  • Published : 1998.06.01
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