Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.06a
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- Pages.42-43
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- 1998
Opptical Studies on $TiN_x$ Films Depposited on Si by Reactive dc Magnetron Spputtering
- Kang, JI-Hoon (Department of Physics, Kon-Kuk University) ;
- Bahng, Jae-Ho (Department of Physics, Kon-Kuk University) ;
- Lee, Myoung-Hee (Department of Physics, Kon-Kuk University) ;
- Kim, Jong-Hyok (Department of Physics, Kon-Kuk University) ;
- Park, Young-Ran (Department of Physics, Kon-Kuk University) ;
- Lee, Hye-Jung (Department of Physics, Kon-Kuk University) ;
- Kim, Kwang-Joo (Department of Physics, Kon-Kuk University)
- Published : 1998.06.01
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