Fabrication of Micro-Electron Arrays with Tip Conditioning Electrode using Self-aligned Method

  • Lim, S.H. (Dept. of Physics, Sun Moon Univ Ahsan, Chungnam) ;
  • Kim, D.W. (Dept. of Physics, Sun Moon Univ Ahsan, Chungnam) ;
  • Choi, S.S. (Dept. of Physics, Sun Moon Univ Ahsan, Chungnam) ;
  • Kim, S.B. (Dept. of Metallurgical Science, Hanyang University) ;
  • Jeon, H.T. (Dept. of Metallurgical Science, Hanyang University)
  • 발행 : 1998.06.01