대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 D
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- Pages.1540-1542
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- 1998
크롬박막 스트레인 게이지의 열처리 특성
Anneling Characteristics of Chromium Thin Film Strain Gauges
- Kang, Kyung-Doo (Dongseo University) ;
- Kim, Sun-Cheol (Kyungnam Imformation College) ;
- Park, Jeong-Do (Kyungnam Imformation College) ;
- Chung, Gwiy-Sang (Dongseo University)
- 발행 : 1998.07.20
초록
This paper presents the deposition and anneling characteristics of Cr thin film strain gaugs, which were deposited on glass by DC magnetron sputtring. The optimzed deposition conditions of Cr thin films were the input DC power, 7 W/
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