대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 D
- /
- Pages.1444-1446
- /
- 1998
Copper formate의 레이저 유도 열 분해에 의한 Cu 박막의 제조
Formation of copper films from copper formate by laser-induced pyrolytic decomposition
- Kim, Jae-Kwon (Dept. of Electrical Engineering, Inha University) ;
- Park, Se-Ki (Dept. of Electrical Engineering, Inha University) ;
-
Lee, Cheon
(Dept. of Electrical Engineering, Inha University)
- 발행 : 1998.07.20
초록
Direct writing of copper lines has been achieved by pyrolytic decomposition of copper formate films using a focused argon ion laser beam(
키워드