대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 D
- /
- Pages.1340-1342
- /
- 1998
DLC 박막 코팅에 의한 IR window의 적외선 투과율 향상에 관한 연구
The improved transmittance of an IR window by coating a DLC film
- Uhm, Hyun-Seok (Dept. of Electrical Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electrical Engineering, Hanyang University) ;
- Park, Sung-Lae (Woo Kyung Electro-Optics Corp.) ;
- Kim, Kyu-Hyun (Woo Kyung Electro-Optics Corp.)
- 발행 : 1998.07.20
초록
The diamond-like carbon(DLC) film, as an antireflection layer, is coated on a commerically used Ge window. DLC films are deposited by using an rf(13.56 MHz) plasma CVD. The optimal value of thickness and refractive index of DLC layer has been determined from the computer simulation. IR-transmittances of DLC-coated Ge windows are estimated by measuring FTIR spectra in the wavelength range of
키워드