Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07d
- /
- Pages.1330-1332
- /
- 1998
Characterization of polycrystalline diamond thin films deposited by using an MPCVD
MPCVD를 이용한 다결정 다이아몬드 박막의 증착 및 물성 분석
- Lee, Jin-Bock (Hanyang University) ;
-
Park, Jin-Seok
(Hanyang University) ;
- Ryu, Kyung-Sun (Kyungwon University) ;
-
Kwon, Sang-Jik
(Kyungwon University)
- Published : 1998.07.20
Abstract
Polycrystalline diamond films are deposited on a Si substrate by employing a 2.45 GHz
Keywords