Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07g
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- Pages.2553-2555
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- 1998
Microprocessing of Ferrite Using Focused Laser Beam in $CCl_2F_2$ Gas Atmosphere
$CCl_2F_2$ 가스분위기에서 집속레이저빔을 이용한 페라이트의 미세가공
- Lee, Kyoung-Cheol (Dept. of Electrical Engineering, Inha Univ.) ;
- Lee, Cheon (Dept. of Electrical Engineering, Inha Univ.)
- Published : 1998.07.20
Abstract
A single crystal Mn-Zn ferrite was directly etched by focused
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