대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 G
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- Pages.2550-2552
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- 1998
점착방지를 위한 승화건조기의 설계방법
Design Method for Sublimation Drying System for Prevention of Stiction
- Kim, Jong-Pal (School of Electrical Engineering, Seoul National University) ;
- Lee, Sang-Woo (School of Electrical Engineering, Seoul National University) ;
- Chun, Kuk-Jin (School of Electrical Engineering, Seoul National University) ;
- Cho, Dong-Il (School of Electrical Engineering, Seoul National University)
- 발행 : 1998.07.20
초록
The stiction phenomena poses a design constraint in surface micromachining by reducing the releasable size of the microstructure. This problem occurs during the fabrication process of surface micromachined microstructures during the wet etch of sacrificial layers. For the prevention of the sticking problem, the microsctructure is released by sublimation after the substitution of the sacrificial layer etchant with a sublimation material heated above its melting temperature. In the sublimation drying method, the sublimation materials such as p-dichlorobenzene, t-butyl alcohol, and cyclohexane are used. In this paper, a method for designing a sublimation drying system is developed, and its performance is experimentally evaluated.
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