대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 G
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- Pages.2536-2538
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- 1998
MEMS용 PSG와 TEOS의 열처리에 따른 잔류응력의 측정
Measurement of residual stress of TEOS and PSG for MEMS
- 이상우 (서울대학교 전기공학부) ;
- 이상우 (서울대학교 전기공학부) ;
- 김종팔 (서울대학교 전기공학부) ;
- 박상준 (서울대학교 전기공학부) ;
- 이상철 (서울대학교 전기공학부) ;
- 김성운 (서울대학교 전기공학부) ;
- 조동일 (서울대학교 전기공학부)
- Yi, Sang-Woo (School of Electrical Engineering, Seoul National University) ;
- Lee, Sang-Woo (School of Electrical Engineering, Seoul National University) ;
- Kim, Jong-Pal (School of Electrical Engineering, Seoul National University) ;
- Park, Sang-Jun (School of Electrical Engineering, Seoul National University) ;
- Lee, Sang-Chul (School of Electrical Engineering, Seoul National University) ;
- Kim, Sung-Un (School of Electrical Engineering, Seoul National University) ;
- Cho, Dong-Il (School of Electrical Engineering, Seoul National University)
- 발행 : 1998.07.20
초록
This paper investigates the residual stress of tetraethoxysilane (TEOS) and 7wt% phosphosilicate glass (PSG), which are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). In order to measure residual stress,
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