대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1998년도 하계학술대회 논문집 G
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- Pages.2390-2392
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- 1998
반도체 공정의 SCRUBBER 감시 시스템 개발
The Development of Monitoring System in the Scrubber of Semiconductor Manufacture Processing
- Kim, Joohn-Hwan (Dept. of Electrical Eng., SoongSil University) ;
- Kim, Sang-Woo (Dept. of Electrical Eng., SoongSil University) ;
- Kim, Beung-Jin (Dept. of Electrical Eng., SoongSil University) ;
- Moon, Hak-Yong (Dept. of Electrical Eng., SoongSil University) ;
- Jeon, Hee-Jong (Dept. of Electrical Eng., SoongSil University)
- 발행 : 1998.07.20
초록
In this paper, we discuss the development of monitoring system with data process equipment which transfers data from Remote Terminal Unit(RTU) to monitoring computer. The RTUs sense temperature, pressure and PLC(Programmable Logic Controller) nodes conditions of scrubber in semiconductor manufacture processing. The data Process equipment is connected every RTU and a monitoring computer through serial communication. This equipment receives informations from RTU, process data, and transfers them to monitoring computer. To avoid congestion in data communication, task scheduling algorithm used RT O/S(Real-Time Operating System) is embedded in ROM which is a part of data Process equipment.
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