대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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- Pages.618-620
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- 1997
제작된 수직 마이크로미러 어레이의 특성 측정
Characteristics measurement of fabricated micromirror array with vertical springs
- Shin, Jong-Woo (School of Electrical Engineering, Seoul National University) ;
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Kim, Yong-Kweon
(School of Electrical Engineering, Seoul National University) ;
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Park, Jin-Goo
(Dept. of Metallurgy and Materials Engineering, Hanyang University) ;
- Shin, Hyung-Jae (Core Technology Research Center, Samsung Electronics Co. Ltd.) ;
- Moon, Jae-Ho (Core Technology Research Center, Samsung Electronics Co. Ltd.)
- 발행 : 1997.11.29
초록
A
키워드