Characteristics measurement of fabricated micromirror array with vertical springs

제작된 수직 마이크로미러 어레이의 특성 측정

A $50{\times}50{\mu}m^2$ aluminum micromirror array is fabricated using shadow evaporation process. The fabrication process is very simple with use of shadow evaporation process, and the micromirror array has a high fill-factor. The static and dynamic characteristics such as deflection angle vs. applied voltage, step response, and frequency response are measured using a contact free optical measurement technique. The downward threshold voltage was 8 V, step response time was $13.5{\mu}s$ when 32 V step voltage applied, and a resonance observed at 11kHz. The lifetime of micromirror with anti-stiction coating was tested and micromirror operated successfully over 200 million cycles of touch-down operations.