Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.11a
- /
- Pages.618-620
- /
- 1997
Characteristics measurement of fabricated micromirror array with vertical springs
제작된 수직 마이크로미러 어레이의 특성 측정
- Shin, Jong-Woo (School of Electrical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering, Seoul National University) ;
- Park, Jin-Goo (Dept. of Metallurgy and Materials Engineering, Hanyang University) ;
- Shin, Hyung-Jae (Core Technology Research Center, Samsung Electronics Co. Ltd.) ;
- Moon, Jae-Ho (Core Technology Research Center, Samsung Electronics Co. Ltd.)
- Published : 1997.11.29
Abstract
A
Keywords