Modeling and Measurement of Electrostatic Micro Mirror Array Fabricated with Single Layer Polysilicon Micromachining Technology

단층 다결정 실리콘 마이크로머시닝 기술로 제작된 정전형 마이크로 미러 어레이의 모델링 및 측정

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.